Events Calendar

NMEMS Sensors for “Fit and Forget” systems, Mustafa Yavuz

Thursday, January 16, 2020
1:30 pm - 2:30 pm
Physics & Astronomy Building (PAB)
Room: 100

Department of Physics and Astronomy


Dr. Mustafa Yavuz

Department of Mechanical & Mechatronics Engineering
University of Waterloo

“Manufacturing, functionalization and packaging Nano and MicroElectro-Mechanical-Systems (NMEMS) Sensors for “Fit and Forget” type self-powered autonomous systems”


Nano and Micro-Electro-Mechanical Systems (N/MEMS) devices such as smart sensors through a combination of optical and micro- and nano-system technologies are revolutionizing low power-high bandwidth electronics. These devices are the building blocks for a vast range of applications, from detecting cancer to wireless/ wearable communications devices, monitoring energy use (electricity and gas) in vehicles and indoor climatic conditions for volatile organic compounds (VOCs) sensing.

While low power and high bandwidth devices through integration of autonomous and embedded sensors will soon number in the tens of billions, Canadian industry is challenged with conflicting objectives for developing the next generation of multi-functional sensor systems that are smaller, self-powered, less costly and reliable. For example, the detailed function of a sensor in the NMEMS chip is critical to the design of the package, and cost effective packaging and robust reliability are two critical factors for successful commercialization of NMEMS devices.

The NSF and DARPA of the US have selected autonomous and embedded MEMS sensors as a research focal point and increased supportive funding dramatically. Similar investments have been made in Europe and Asia, causing the manufacturing of NMEMS sensors to become a substantial part of advanced manufacturing technologies. To stay competitive in these technologies, Canada must make a comparable investment. The total global revenue for N/MEMS including sensors is predicted to increase exponentially and exceed US$102 billion by 2022 (

STUDENTS – after the talk, you’re encouraged to return to the 2nd floor Atrium lounge to meet with the speaker.
COFFEE – coffee and cookies will be available in the 2nd floor Atrium lounge at 1:15 p.m.
CELL PHONES – as a courtesy to the speaker and audience, please set your cellphones to “silent” mode. Thanks!
Prof. Giovanni Fanchini
Jodi Guthrie - Assistant to the Chair
519-661-2111 ext. 86438
Event Type:

Powered by Blackbaud
nonprofit software